APPARATUS AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON USING HORIZONTAL REACTOR

摘要

Provided is a polysilicon preparation apparatus. The polysilicon preparation apparatus comprises: a horizontal type reaction pipe including a raw material gas supply port, a remaining gas outlet port, a reaction surface which is in contact with a raw material gas including a reaction gas and a reduction gas, and an opening formed at the bottom of the horizontal type reaction pipe to discharge molten polysilicon generated by reaction of the raw material gas; a first heating means to heat the reaction surface of the horizontal type reaction pipe; and a polysilicon collection container to collect molten silicon discharged from the opening at the bottom of the horizontal type reaction pipe. The horizontal type reaction pipe includes at least one reaction region formed by connecting a first region and a second region in series, wherein the first region extracts polysilicon and the second region converts reaction byproducts into the reaction gas. Also, provided is a polysilicon preparation method using the polysilicon preparation apparatus.