发明名称 MEMSセンサ
摘要 The object of the invention is to provide a movable sensor, which is provided with a higher sensitivity by comparing with the prior art. The movable sensor is provided with a first movable part (2) and a second movable part (3), which can be moved along a height direction and have different weights; a first connecting rod part (10) and a second connecting rod part (11), which are rotatably freely connected together. The first connecting rod part (10) is connected with a supporting part (15) with the help of a first supporting point connecting spring (16). The first supporting point connecting spring (16) is disposed on a left side of the left end part (3c) of the second movable part, and a second supporting point connecting spring (20) is disposed on the right end part (3d) of the second movable part.
申请公布号 JP5898571(B2) 申请公布日期 2016.04.06
申请号 JP20120124349 申请日期 2012.05.31
申请人 アルプス電気株式会社 发明人 矢澤 久幸;大川 尚信;高橋 亨;菊入 勝也
分类号 G01P15/125;B81B3/00;G01P15/08;H01L29/84 主分类号 G01P15/125
代理机构 代理人
主权项
地址
您可能感兴趣的专利