发明名称 不揮発性記憶素子、不揮発性記憶装置、不揮発性記憶素子の製造方法、及び不揮発性記憶装置の製造方法
摘要 A nonvolatile memory element including: a first electrode; a second electrode; a variable resistance layer that is between the first electrode and the second electrode and includes, as stacked layers, a first variable resistance layer connected to the first electrode and a second variable resistance layer connected to the second electrode; and a side wall protecting layer that has oxygen barrier properties and covers a side surface of the variable resistance layer. The first variable resistance layer includes a first metal oxide and a third metal oxide formed around the first metal oxide and having an oxygen deficiency lower than that of the first metal oxide, and the second variable resistance layer includes a second metal oxide having an oxygen deficiency lower than that of the first metal oxide.
申请公布号 JP5899474(B2) 申请公布日期 2016.04.06
申请号 JP20130533492 申请日期 2012.09.10
申请人 パナソニックIPマネジメント株式会社 发明人 米田 慎一;三河 巧;伊藤 理;早川 幸夫;姫野 敦史
分类号 H01L27/105;H01L27/10;H01L45/00;H01L49/00 主分类号 H01L27/105
代理机构 代理人
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