| 摘要 |
The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):
wherein
M represents a metal atom;
R 1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;
R 2 and R 3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R 2 and R 3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;
Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and
n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3; with the proviso that
the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;
the metal compounds in which M is Mg (Magnesium) and R 1 is methyl group are excluded;
the metal compounds in which M is Zn (Zinc) and R 1 is methyl group are excluded;
the metal compounds in which M is Bi (Bismuth) and R 1 is t-butyl group are excluded; and
in cases where n is two or greater, two or more ligands may be the same as, or different from each other; and a method of producing a metal-containing thin film using the metal compound. |
