| 摘要 |
The present invention provides a laser irradiation apparatus for manufacturing a flexible display device, which can perform both a laser scribing process and a laser release process using a single laser generation unit. The laser irradiation apparatus for manufacturing a flexible display device according to the present invention may comprise: a first wavelength conversion module which converts a source laser, incident from a laser generation unit, into a first laser having a first wavelength; a laser separation unit which separates second and third lasers from the first laser incident from the first wavelength conversion module; a scribing laser generation unit which generates a scribing source laser using the second laser; a scribing laser irradiation unit which converts the scribing source laser into a scribing laser in the form of a spot, and irradiates a flexible substrate with the scribing laser; a release laser generation unit which generates a release source laser using the third laser; and a release laser irradiation unit which converts the release source laser into a release laser in the form of a square beam, and irradiates a release layer with the release laser. |
