发明名称 真空蒸着方法、真空蒸着装置、有機EL表示装置の製造方法及び有機EL表示装置
摘要 <P>PROBLEM TO BE SOLVED: To facilitate deposition of a high definition thin film pattern without using a shadow mask. <P>SOLUTION: The manufacturing method of an organic EL display device in which a luminous layer of an organic EL material is formed by evaporating the organic EL material in a vacuum vessel, and depositing the organic EL material selectively on a plurality of pixel electrodes provided in matrix on the surface of a substrate for organic EL display, includes a step for not electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to a point where the luminous layer is formed, on the substrate side but electrifying the resistor so that a temperature limited not to cause sublimation of the organic EL material occurs therein, and a step for electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to the point where the luminous layer is not formed, on the substrate side so that a temperature sufficient for causing sublimation of the organic EL material occurs therein. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5899583(B2) 申请公布日期 2016.04.06
申请号 JP20110176251 申请日期 2011.08.11
申请人 株式会社ブイ・テクノロジー 发明人 工藤 修二;木村 江梨子;水村 通伸;梶山 康一
分类号 H05B33/10;C23C14/04;G09F9/30;H01L27/32;H01L51/50;H05B33/12 主分类号 H05B33/10
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