摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate deposition of a high definition thin film pattern without using a shadow mask. <P>SOLUTION: The manufacturing method of an organic EL display device in which a luminous layer of an organic EL material is formed by evaporating the organic EL material in a vacuum vessel, and depositing the organic EL material selectively on a plurality of pixel electrodes provided in matrix on the surface of a substrate for organic EL display, includes a step for not electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to a point where the luminous layer is formed, on the substrate side but electrifying the resistor so that a temperature limited not to cause sublimation of the organic EL material occurs therein, and a step for electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to the point where the luminous layer is not formed, on the substrate side so that a temperature sufficient for causing sublimation of the organic EL material occurs therein. <P>COPYRIGHT: (C)2013,JPO&INPIT |