发明名称 METHODS FOR FORMING A MEMORY CELL WITH SILICON-CONTAINING CARBON SWITCHING LAYER
摘要 In a first aspect, a method of forming a memory cell is provided that includes (1) forming a metal-insulator-metal (MIM) stack, the MIM stack including (a) a first conductive carbon layer; (b) a low-hydrogen, silicon-containing carbon layer above the first conductive carbon layer; and (c) a second conductive carbon layer above the low-hydrogen, silicon-containing carbon layer; and (2) forming a steering element coupled to the MIM stack. Numerous other aspects are provided.
申请公布号 EP2539936(B1) 申请公布日期 2016.04.06
申请号 EP20110703361 申请日期 2011.02.09
申请人 SANDISK 3D LLC 发明人 KREUPL, FRANZ;ZHANG, JINGYAN;XU, HUIWEN
分类号 H01L27/24;H01L45/00 主分类号 H01L27/24
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