| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for imprint, an alignment method, an imprint method, and an imprint device which do not require a complicated process in manufacture of a mold, can directly and optically identify an aliment mark made of the same material as a mold material, and can perform alignment with high alignment accuracy.SOLUTION: In step and repeat type imprinting, an alignment mark on a mold side is formed in a mesa structure different from a transfer region of a mold, and is aligned not with an alignment mark on a substrate side in a transferred region to be imprinted but with the alignment mark on the substrate side in another transferred region in contact with the transferred region. |
