发明名称 SUBSTRATE HAVING MULTIPLE NANO-GAP AND FABRICATING METHOD FOR THE SAME
摘要 The present invention relates to a substrate including nano-gaps and a manufacturing method thereof, and more particularly, to a substrate including nano-gaps, having the nano-gaps formed between metal-containing nano particles, between the metal-containing nano particles and a metal-containing thin film layer, and between the metal-containing thin film layers separated by an inorganic-containing thin film layer. The substrate comprises: a substrate having protrusion-shaped structures separated from each other; the metal-containing nano particles formed on the surface of the substrate and the protrusion-shaped structures; and a continuous layer formed between the substrate and the metal-containing nano particles, and including at least one inorganic-containing thin film layer and at least one metal-containing thin film layer. Accordingly, the substrate provides an effect for amplifying an enhanced plasmon resonance by having the nano-gaps.
申请公布号 KR20160037371(A) 申请公布日期 2016.04.06
申请号 KR20140129531 申请日期 2014.09.26
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 YUN, JUNG HEUM;PARK, SUNG GYU;KIM, DONG HO;MUN, CHAE WON
分类号 G01J3/44 主分类号 G01J3/44
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