发明名称 テープ貼着装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a tape sticking device capable of cutting a tape in accordance with a substrate size and automatically sticking an adhesive tape to a substrate. <P>SOLUTION: A tape sticking device 2 includes: temporary holding means having an inverse table 20 which temporarily holds a rectangular substrate carried out from a cassette 8 placed on a cassette placement table 6 by carrying in and out means 10 and can be inverted by 180 degrees by inverting means 24; a holding table 28 which is positioned right below the temporary holding means and receives the rectangular substrate from the inverse table 20 inverted by 180 degrees and holds the rectangular substrate; vertical direction movement means which relatively moves the holding table 28 and the temporary holding means in a vertical direction and makes the rectangular substrate temporarily held by the temporary holding means deliverable to the holding table 28; holding table movement means 42 which moves the holding table 28 between a substrate delivery position right below the temporary holding means and a sticking position where a tape is stuck to the rectangular substrate held by the holding table; and a tape sticking mechanism 46 disposed on the sticking position. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5901215(B2) 申请公布日期 2016.04.06
申请号 JP20110225520 申请日期 2011.10.13
申请人 株式会社ディスコ 发明人 水島 亮;上原 健;石井 茂;平賀 洋行
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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