| 摘要 |
A leakage test method by testing a change in gas pressure and temperature comprises: a test space (a chamber), a volume control device (a pressure changing device) connected to the test space (the chamber), and a sensor which is able to detect a condition (temperature and pressure) of the test space (the chamber). While the test space (the chamber) is sealed, the volume control device (the pressure changing device) is driven to change a volume to detect a condition change (temperature and pressure) of the test space (the chamber) to derive an initial volume of the test space (the chamber) prior to the change. The volume control device (the pressure changing device) is continuously driven to change the volume of the test space (the chamber) to detect the condition change (temperature and pressure) to use a condition value after the change, and a previous condition value to derive the volume after the change. A derived result is compared with a result obtained by subtracting a volume control amount of the volume control device from the volume of the previous condition to determine a leakage if the results are different. The series of processes are set and performed in a plurality of steps to a reference pressure to determine a leakage in the reference pressure and a leakage start pressure if a leakage occurs prior to the reference pressure. The series of processes is able to quickly be performed by control and detection of a microcomputer to quickly and accurately detect whether a leakage occurs. |
