Semiconductor devices including cell-type power decoupling capacitors

摘要

A semiconductor device includes an internal circuit and a cell-type power decoupling capacitor. The cell-type power decoupling capacitor is formed on a semiconductor substrate using a stack cell capacitor process. The cell-type power decoupling capacitor stabilizes a supply voltage to provide the stabilized supply voltage to the internal circuit. Accordingly, the semiconductor device including the cell-type power decoupling capacitor may be insensitive to power noise and may occupy a small area on a chip.

主权项

1. A semiconductor device, comprising:
a substrate; an internal circuit in the substrate; and a cell-type power decoupling capacitor on the internal circuit, the cell-type power decoupling capacitor stabilizing a supply voltage to provide the stabilized supply voltage to the internal circuit; wherein the cell-type power decoupling capacitor comprises: a first conductive layer connected to a first supply voltage; a second conductive layer connected to a second supply voltage that is lower than the first supply voltage, and separated from the first conductive layer; and a dielectric layer disposed between the first conductive layer and the second conductive layer, wherein the cell-type power decoupling capacitor is on a metal-oxide-semiconductor field-effect transistor (MOSFET).