Aryl acetate onium materials

摘要

Acid generators comprising a carbocyclic aryl or heteroaromatic group substituted with at least one acetate moiety are provided. These acid generators are particularly useful as a photoresist composition component.

主权项

1. An acid generator comprising a structure of Formula (V): wherein: Z is a counter anion; R2 is H or is a group comprising an acid-labile moiety; each T, each T′ and each T″ are the same or different non-hydrogen substituent, wherein either of T and T″ or T and T′ are capable of joining to form a ring; n is 0, 1, 2, 3 or 4; n′ and n″ are each independently 0, 1, 2, 3, 4 or 5; J represents a chemical bond, or a group capable of covalently linking B and C; D and D′ are the same or different and are each hydrogen or a non-hydrogen substituent, and optionally taken together may form a ring; and A, B, and C are the same or different optionally substituted carbocyclic aryl or optionally substituted heteroaromatic group.