发明名称 |
Wiring substrate and semiconductor device |
摘要 |
A wiring substrate includes a first multi-layer wiring layer including an insulating layer formed of a non-photosensitive resin, a plurality of external connection pads formed on an upper face side of the first multi-layer wiring layer, and a second multi-layer wiring layer formed on the first multi-layer wiring layer, the second multi-layer wiring layer including an insulating layer formed of a photosensitive resin, the second multi-layer wiring layer having a wiring pitch narrower than the wiring pitch of the first multi-layer wiring layer. The external connection pads are exposed from the insulating layer of the second multi-layer wiring layer. |
申请公布号 |
US9307641(B2) |
申请公布日期 |
2016.04.05 |
申请号 |
US201514633525 |
申请日期 |
2015.02.27 |
申请人 |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
Oi Kiyoshi;Kurihara Takashi |
分类号 |
H01L23/12;H05K1/11;H01L23/498;H01L23/00;H01L25/065;H05K1/02 |
主分类号 |
H01L23/12 |
代理机构 |
Kratz, Quintos & Hanson, LLP |
代理人 |
Kratz, Quintos & Hanson, LLP |
主权项 |
1. A wiring substrate, comprising:
a first multi-layer wiring layer including an insulating layer formed of a non-photosensitive resin; a plurality of external connection pads formed on an upper face side of the first multi-layer wiring layer; and a second multi-layer wiring layer formed on the first multi-layer wiring layer, the second multi-layer wiring layer including an insulating layer formed of a photosensitive resin, the second multi-layer wiring layer having a wiring pitch narrower than a wiring pitch of the first multi-layer wiring layer, wherein the insulating layer of the second multi-layer wiring layer is formed to be opened such that the plurality of external connection pads are exposed. |
地址 |
Nagano-shi JP |