Deposition apparatus, method for forming thin film using the same, organic light emitting display apparatus and method for manufacturing the same

摘要

A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.

主权项

1. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus, the method comprising:
forming, on the substrate, an inorganic layer; and forming, on the inorganic layer, an organic layer to cover one or more particles on the inorganic layer and to have a curved surface corresponding to a shape of each of the one or more particles, the forming of the organic layer comprising:
spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus; andhardening the one or more depositing materials by irradiating the one or more depositing materials using a hardening unit of the deposition apparatus after the one or more depositing materials have reached the substrate.