PATTERNING APPARATUS FOR GRAPHENE OXIDE THIN FILM, PATTERNING METHOD FOR GRAPHENE OXIDE THIN FILM, AND GRAPHENE OXIDE THIN FILM BY MANUFACTURING USING THE SAME

摘要

An apparatus to pattern a graphene oxide thin film, a method to pattern a graphene oxide thin film, and a graphene oxide thin film fabricated using the same are provided. According to an embodiment of the present invention, an apparatus (100) to pattern a graphene comprises: a spray nozzle (110) having an aperture (111) of which a width is narrower on a lower part formed on a lower end; at least a pair of electric field generation electrodes (120) installed adjacent to the aperture (111) of the spray nozzle to face the spray nozzle to form an AC electric field with specific intensity; a graphene solution supply unit (130) to supply graphene solution (10) to the spray nozzle (110); and a driving unit (140) to move the spray nozzle (110) along a predetermined pattern path. According to the apparatus to pattern the graphene oxide thin film, the graphene oxide thin film with a desired pattern is able to be patterned as the apparatus is able to form the graphene oxide thin film in a selected location on a top surface of a substrate by equidistantly forming at least one pair of electric field generation electrodes on an end of the spray nozzle. Moreover, in accordance with the method to pattern the graphene oxide thin film, a graphene oxide thin film is able to be fabricated solely using one patterning process without the requirement of a high-temperature CVD process to form a CVD graphene since the method uses the oxide graphene.