| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor maintaining high sensitivity even when it is made smaller, an electronic apparatus and a movable body with the physical quantity sensor.SOLUTION: A physical quantity sensor 100 according to the present invention includes: a base plate 10; a supporting part 40; a movable part 20 connected to the supporting part 40 with connecting parts 30 and 32; and a fixed electrode for the base plate 10 facing the movable part 20, the movable part 20 having a first mass part 20a, a second mass part 20b with mass smaller than that of the first mass part 20a, a first movable electrode 21 in the first mass part 20a, and a second movable electrode 22 in the second mass part 20b, the fixed electrode being formed of a first fixed electrode 50 and a second fixed electrode 52, and the relation of 0.2≤L2/L≤0.48 being satisfied when the length of the movable part 20 in the longitudinal direction is defined as L and the length of the second mass part 20b is defined as L2.SELECTED DRAWING: Figure 1 |
