| 摘要 |
PROBLEM TO BE SOLVED: To achieve size reduction and suppress the change of the resonant frequency of a resonant scanning section with the application of a voltage to a mirror driving line while configuring a varifocal mirror by a piezoelectric film.SOLUTION: A mirror drive line 30 is provided to extend from a varifocal mirror 20 through the interior of a resonant scanning section 10. While grooves are provided between a resonant scanning electrode 14, to which a resonant scanning voltage is applied, in the resonant scanning section 10 and a surface conductor layer 34 in the mirror drive line 30 so as to isolate the resonant scanning electrode 14 from the mirror drive line 30, not a piezoelectric film but a non-piezoelectric insulating film 33 is disposed between the surface conductor layer 34 and a conductive base material 31.SELECTED DRAWING: Figure 1 |
