ABNORMALITY DETECTION SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an abnormality detection system capable of detecting the abnormality of an auxiliary machine accessory to a semiconductor manufacturing device and a method for manufacturing a semiconductor device.SOLUTION: The abnormality detection system of an auxiliary machine accessory to a semiconductor manufacturing device includes: a collection part 110; a first calculation part 120; a second calculation part 130; and a determination part 140. The collection part collects a plurality of types of parameters related to the state of the auxiliary machine. The first calculation part calculates degrees of divergence of coordinate points in a virtual coordinate space about the plurality of types of parameters from a reference space. The coordinate points are points shown by the collected plurality of types of parameters. The second calculation part accumulates the calculated degrees of divergence to calculate a cumulative degree of divergence. The determination part compares the calculated cumulative degree of divergence with a threshold to determine the abnormality of the auxiliary machine.SELECTED DRAWING: Figure 1