| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device inspection apparatus for evaluating an insulating film by a MOS capacitor.SOLUTION: A stage 10 is an XY stage for mounting a semiconductor device 18 to be inspected, and at least a part of which is conductive. A first terminal 12 and a second terminal 14, that are conductivity probes, include a function for applying a voltage or a current to the semiconductor device 18, and are connected with a power supply 20 on the outside of a semiconductor device inspection apparatus 100. The first terminal 12 is connected electrically with the conductive stage 10, and voltage is applied from the back side of the semiconductor device 18 in contact with the stage 10.SELECTED DRAWING: Figure 1 |
