| 摘要 |
PROBLEM TO BE SOLVED: To appropriately evaluate the accuracy of a droplet landing position of a droplet discharged from a nozzle.SOLUTION: An inspection device 1 discharges droplets 15 to a glass plate 8 placed on a glass plate xy table 6 from a nozzle 5 a plurality of times. The inspection device 1 makes the glass plate 8 move every discharge so that the landed droplets 15 do not overlap with one another. The inspection device 1 images the droplets 15 landed on the glass plate 8 by a camera 10 from the rear side of the glass plate 8 and analyzes each droplet landing position by the image. The inspection device 1 calculates an error between a target point where the droplet 15 is landed and an actually landed point and statistically calculates directions, ranges and a degree of variation of the droplets 15 discharged from the nozzle 5.SELECTED DRAWING: Figure 1 |
