| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus and a laser processing method which enable a reduction in thermal lens action in AOM by dispensing with means of predicting a laser irradiation timing.SOLUTION: A laser processing apparatus comprises: a laser oscillation control part, which determines for every constant time interval whether a total sum of laser energy values of laser pulse inputted into an acousto-optic modulator reaches a predetermined value over a period specified from past and, when a predetermined value is not reached, oscillates an additional laser pulse having a smaller laser energy than a laser pulse used for processing to control to input into the acousto-optic modulator; and an acousto-optic modulator control part, which controls to branch laser pulses inputted into the acousto-optic modulator in a non-workpiece direction, including period of the additional laser pulse over a period excluding a period of branch in the workpiece direction.SELECTED DRAWING: Figure 1 |
