AIR GAP STRUCTURE AND METHOD

摘要

A device comprises: a first protection layer placed on sidewalls and a bottom of a first trench in a first dielectric layer; a first barrier layer placed on the first protection layer; a first metal line in the first trench; a second protection layer placed on sidewalls and a bottom of a second trench in the first dielectric layer; a second barrier layer placed on the second protection layer; a second metal line in the first trench; an air gap between the first trench and the second trench; and a third protection layer placed on sidewalls of a third trench in the first dielectric layer. The first, second, third protection layers are made of the same material. According to the present invention, provided are a structure and a method of an air gap.