X-RAY INSPECTION DEVICE, X-RAY INSPECTION METHOD AND X-RAY INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a technique for determining the presence or absence of a void in a filled formation part which is formed by filling a through-hole with metal plating.SOLUTION: An X-ray inspection device comprises: X-ray image acquisition means for acquiring a plurality of X-ray images captured from various directions by irradiating a filled formation part formed by filling a through-hole with metal plating, with X-ray; reconfiguration arithmetic means for performing reconfiguration arithmetic on the basis of the plurality of X-ray images; and determination means for extracting a feature quantity specific to a void in the filled formation part formed by filling the through-hole with metal plating according to the reconfiguration information acquired by the reconfiguration arithmetic to determine the presence or absence of a void in the filled formation part on the basis of the feature quantity.SELECTED DRAWING: Figure 1