| 摘要 |
Disclosed in the present invention is a wafer tray driving device for a semiconductor vacuum apparatus. The disclosed wafer tray driving device for a semiconductor vacuum apparatus comprises: a main body coupled to a vacuum chamber; a tray driving shaft installed to be rotatable and reciprocably movable on the main body, and coupled to a wafer tray positioned inside the vacuum chamber; and a shaft sealing support unit equipped on the main body for guiding the rotation and the reciprocal movement of the tray driving shaft, and sealing the rotation and the reciprocal movement of the tray driving shaft in different methods. Accordingly, the device is capable of improving sealing effects by sealing and treating the rotational movement and the straight line reciprocal movement in different methods, and preventing the breakage of the sealing by driving the tray driving shaft. |
