GOING UP AND DOWN APPARATUS AND APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

The present invention relates to a lifting device including a lifting unit lifting a transferring arm to change a height of the transferring arm for transferring a substrate, a lifting guide unit joined to the lifting unit and guiding the upward and downward movement of the transferring arm, a lifting guide block moved upward and downward along the lifting guide unit, and a supporting unit joined to the lifting guide unit to prevent the movement of the lifting guide unit in a direction perpendicular to a direction where the transferring arm moves upward and downward and to a substrate transferring device. According to the present invention, the accuracy of a work for transferring the substrate supported by the transferring ram moving upward and downward along the lifting unit can be improved by preventing the lifting unit from being escaped from a lifting passage when the lifting guide unit is dislocated.