| 摘要 |
PROBLEM TO BE SOLVED: To provide a platinum-silicon composite tip apex applied in field detection, and a preparation method thereof.SOLUTION: A platinum-silicon composite tip apex is prepared by: performing a local electrochemical reaction between a metal precursor solution and a modified silicon tip apex, by using an electroless plating deposition method (or, an electron beam induced deposition method) to obtain a local and selective platinum nanostructure deposition effect which is also accurately controlled; and further, through an atmospheric microwave annealing process, forming a local platinum silicide layer between the platinum nanostructure and the modified silicon probe tip apex.EFFECT: Conductivity of the tip apex and a field detection space analysis capability are significantly improved, therefore, the invention can be utilized as a probe in a high field sensitive scanning probe microscopic technology (FS-SPM). Also, not only preventing a stray field effect (SFE), but also an excellent image quality can be obtained. The probe tip containing platinum silicide effectively improves electron transmission effect in an interface compared to a probe tip having a platinum nanostructure only, thereby capable of being applied for a conductive probe which is controllable and has high space analysis capability.SELECTED DRAWING: Figure 3 |
