发明名称 POLISHING TOOL
摘要 PROBLEM TO BE SOLVED: To provide a polishing tool having a further excellent polishing characteristic, by increasing a polishing agent (an abrasive grain) for contributing to polishing by improving holding power of slurry in a polishing surface on a conventional porous polishing pad and a metal surface plate and effectively acting the holding power, and also reducing a change in a mechanical physical property value around normal temperature in a base material.SOLUTION: A polishing tool comprises an epoxy resin or a mixed resin of the epoxy resin and a urethane resin, and a base material in which an epoxy resin or a mixed resin of the epoxy resin and a urethane resin is coated or impregnated and hardened on or into a porous foundation material or a metallic foundation material, and uses a hardening agent hardenable-moldable by having a hydrophilic group in the base material as the hardening agent for hardening-molding the base material.SELECTED DRAWING: Figure 2
申请公布号 JP2016043451(A) 申请公布日期 2016.04.04
申请号 JP20140169813 申请日期 2014.08.22
申请人 RITSUMEIKAN;TOOL BANK:KK;KOKONOE DENKI KK 发明人 TANI YASUHIRO;KIRINO CHUJI;NOMURA NOBUYUKI
分类号 B24B37/24;B24B37/26;H01L21/304 主分类号 B24B37/24
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