| 摘要 |
The present invention relates to a dike to prevent damage caused by cleansing solutions from semiconductor and LCD chemical cleansing equipment, and more particularly, to a dike easily movable when the cleansing equipment is moved to other places. The dike (100) capable of preventing the spread of a cleansing solution leaked from the semiconductor and LCD chemical cleansing equipment (200) comprises: a protective wall installed to prevent the spread of the cleansing solution leaked from the cleansing equipment (200) on a bottom surface where the cleansing equipment (200) is installed; epoxy (500) filling the inside of the protective wall; holders (71, 72, 80) respectively holding supports (211, 212) supporting the cleansing equipment (200) and a tube (220) connected to the cleansing equipment (200) so that the supports (211, 212) and the tube (220) are separated from the epoxy (50); and silicon (60) filling the insides of the holders (71, 72, 80). The protective wall includes an outer wall (11) having a coupling protrusion (13) on the inner side thereof and an inner wall (12) coupled to the coupling protrusion (13) by leaving a space between the outer wall (11) and the inner wall (12). The epoxy (50) fills the inner side of the protective wall and the space between the outer wall (11) and the inner wall (12). |
