HYDROPHOBIC TREATMENT METHOD, HYDROPHOBIC TREATMENT DEVICE, AND RECORDING MEDIUM FOR HYDROPHOBIC TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a hydrophobic treatment method capable of sufficiently and stably imparting hydrophobicity expected according to a heat treatment temperature of a substrate to the substrate, a hydrophobic treatment device, and a recording medium.SOLUTION: A hydrophobic treatment method for hydrophobizing a surface of a substrate comprises the steps of: (A) supplying a process gas for hydrophobing to the surface of the substrate; (B) exposing the surface of the substrate to the atmosphere containing the process gas over a prescribed time; and (C) heating the substrate in the presence of the process gas after the step (B).SELECTED DRAWING: Figure 5