IMAGING DEVICE WITH DUMMY PATTERN

摘要

PROBLEM TO BE SOLVED: To provide an imaging device.SOLUTION: An imaging device comprises a plurality of photoelectric conversion elements formed on a substrate in an active region. A microlens structure is disposed above the photoelectric conversion elements. A dummy pattern having a plurality of protruding elements is disposed above the substrate in a peripheral region surrounding the active region. Furthermore, a passivation film is conformally formed on the microlens structure and the dummy pattern. The passivation film in the upper parts of the protruding elements of the dummy pattern has a surface area smaller than a surface area of the peripheral region outside the microlens structure.SELECTED DRAWING: Figure 2