| 摘要 |
PROBLEM TO BE SOLVED: To provide an aperture member manufacturing method capable of manufacturing an aperture member including an opening having a desired dimensional shape with high reproducibility.SOLUTION: In a plurality of chip areas C on a substrate 101, a first pattern is drawn while changing a lithography condition and on the basis of the first pattern, the substrate 101 is processed, thereby forming a second pattern. A dimension accuracy and an edge position accuracy of the second pattern in each chip area are measured and the chip area C in which the second pattern having desired dimension accuracy and edge position accuracy is formed is segmented from the substrate 101, thereby creating a template 200. The template 200 is then brought into contact with a resist 222 on a surface of a substrate 220, patterning of a transfer pattern corresponding to a template pattern is performed on the resist, and a recess 230 is formed while using the transfer pattern as a mask. A recess 240 is then formed from a rear side of the substrate so as to communicate with the recess 230, and an opening 252 is formed that penetrates the substrate 220.SELECTED DRAWING: Figure 9 |
