PURIFICATION OF NITROGEN TRIFLUORIDE BY PRESSURE SWING ABSORPTION

摘要

PROBLEM TO BE SOLVED: To provide further purified NF.SOLUTION: There is provided a pressure-swing adsorption process for producing a purified nitrogen trifluoride (NF) product gas from a feed gas contaminated with carbon tetrafluoride (CF) using a column packed with an adsorbent that exhibits selectivity for NFrather than CF. The process separates the feed gas into a first product gas having a greater concentration of CFthan the feed gas and a second product gas having a less concentration of CFwithout the use of an inert carrier gas while recovering essentially all of the NF. The process includes: filling the column with the feed gas until the column reaches a first pressure; removing the first product gas; and then removing the second product gas. The column is at a second pressure after the second product gas is removed. A rinse gas of NFand CFmay be used to remove the first product gas or the second product gas.SELECTED DRAWING: Figure 1