发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device capable of easily and surely placing a workpiece on a chuck table.SOLUTION: A plurality of workpiece positioning means (46) are disposed correspondingly to an outer edge (16b) of a chuck table (16) in the case where the chuck table is positioned in a carry-in/carry-out area. The workpiece positioning means includes: a rotary actuator (48); and an abutment member (50) that is rotated between an action position and a retraction position by the rotary actuator. The abutment member is formed in such a manner that a lower end (50b) is positioned lower than a holding surface (16a) of the chuck table in a state where the abutment member is set at the action position, and the workpiece can be placed at a desired position on the chuck table by abutting an outer edge (11a) of a workpiece (11) to a side face (50c).SELECTED DRAWING: Figure 2
申请公布号 JP2016046397(A) 申请公布日期 2016.04.04
申请号 JP20140170051 申请日期 2014.08.25
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUDA TOMOHITO;IKUSHIMA MITSURU;NEGA RYOHEI
分类号 H01L21/304;B23D1/04;B23Q3/18;H01L21/68;H01L21/683 主分类号 H01L21/304
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