| 摘要 |
PROBLEM TO BE SOLVED: To provide a template capable of enhancing the filling properties while reducing the release force.SOLUTION: A template includes a template pattern having a convex portion pattern and a concave portion pattern. A high contact angle part, having a contact angle for resist higher than a predetermined value, is arranged on the template. The high contact angle part is arranged on an arrangement surface, i.e., at least one of the top surface of the convex portion pattern and the valley bottom surface of the concave portion pattern, out of the wall surface of the template pattern.SELECTED DRAWING: Figure 4 |
