| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of preventing degradation of an electrical signal in an optical semiconductor device.SOLUTION: A transmission line ETL for an electric signal is surrounded, in a cross section orthogonal to an extension direction, by a shield portion SP composed of first wiring NM1 for noise cut, a second plug PL2, wiring M1 of a first layer, a first plug PL1, a semiconductor layer SSL for shield, the first plug PL1, the wiring M1 of the first layer, the second plug PL2, and second wiring NM2 for noise cut, and the shield portion SP is fixed at a reference potential. Thus, noise that is caused by the magnetic field or the electric field from a semiconductor substrate SUB to affect the transmission line ETL for the electric signal is shielded by the shield portion SP.SELECTED DRAWING: Figure 2 |
