| 摘要 |
PROBLEM TO BE SOLVED: To provide a Mach-zehnder modulator that can reduce the influences of reflected in-phase components.SOLUTION: A Mach-zehnder modulator 10 comprises: a first conductivity type semiconductor region 13 extending in a direction of a first axis Ax1 on a principal surface of a substrate 27; a first semiconductor arm 15 provided on the first conductivity type semiconductor region 13; a second semiconductor arm 17 provided on the first conductivity type semiconductor region 13; a first electrode 19 receiving one differential driving signal applied to the first semiconductor arm 15; a second electrode 20 receiving the other differential driving signal applied to a second semiconductor arm 17; a first GND electrode 23 connected to the first conductivity type semiconductor region 13; and a second GND electrode 25 connected to the first conductivity type semiconductor region 13 and separated from the first GND electrode 23.SELECTED DRAWING: Figure 1 |
