FUNCTIONAL ELEMENT PIECE MANUFACTURING METHOD, FUNCTIONAL ELEMENT PIECE, FUNCTIONAL ELEMENT, VIBRATOR, ELECTRONIC APPARATUS, AND MOBILE ENTITY

摘要

PROBLEM TO BE SOLVED: To provide a functional element piece manufacturing method with which it is easy to separate an object from a support substrate, a high-reliability functional element obtained from the functional element piece manufacturing method, and a high-reliability vibrator, electronic apparatus and mobile entity provided with the functional element.SOLUTION: A method for forming the functional element piece has the steps for: forming a mask 42M on the underside of a quartz substrate 40 having an element formation area 405 and an element non-formation area 406; securing the quartz substrate 40 to a silicon wafer via adhesive tape in such a way that the mask 42M faces the adhesive tape side; patterning the quartz substrate 40 by etching; and supplying a treatment agent to the mask M42 via the through-hole formed by pattering and separating the quartz substrate 40 from the adhesive tape, the mask 42M having a groove 421 in a portion where it overlaps the element non-formation area 406.SELECTED DRAWING: Figure 4