| 摘要 |
PROBLEM TO BE SOLVED: To find out an optimum measurement condition and obtain a highly reliable measured value in the measurement of an element to be measured that has temperature dependency.SOLUTION: When an element DUT to be measured is an element (especially an electric double layer capacitor) which causes self-heat generation by a measurement current I applied thereto and has temperature dependency that the characteristic value (especially, internal resistance) to be obtained is thereby made to change, the measurement current I outputted from an AC current source 10 is raised at a prescribed rate of increment from an initial minimum current value, the temporal change rate B of an internal resistance R is calculated and successively compared with a threshold A during that time, the maximum current value of the measurement current I is found out within a range in which the temporal change rate B does not exceed the threshold A, and, when finding the characteristic value of the element to be measured, a measurement current indicating the maximum current value is set to the measurement current considered to be optimum for the element to be measured.SELECTED DRAWING: Figure 1 |
