| 摘要 |
The present invention relates to an apparatus and a method for prealigning. The apparatus of the present invention, in an apparatus for prealigning a base material to be aligned which comprises a first side, and a second side facing the first side vertically, comprises: a holding unit placed on the bottom of the base material to be aligned to hold the base material to be aligned; a pressurizing unit to pressurize the first side or the second side in a direction to be closer; an elevating means to elevate the holding unit to elevate the first side or the second side; and a control unit to align the base material to be aligned by letting the pressurizing unit pressurize the first side or the second side when the holding unit, where the first side is held, rises, and letting the pressurizing unit pressurize the first side or the second side when the holding unit, where the second side is held, rises. Accordingly, the present invention allows control of prealigning work to hold the center to prevent the position of a substrate from being deformed even in a large-area substrate, and can align a large-area substrate loaded with the center distorted. |
