| 摘要 |
The present invention improves a structure of a by-product counter-flow preventing device disclosed in Korea Patent Registration No. 10-1040632 proposed by an applicant of the present invention to prevent damage such as cracks from being generated in a body when used, thus achieving stable use for a long time, and to further ensure the sealing of a joint, thus further increasing safety. To this end, a by-product counter-flow preventing device for an exhaust duct in a semiconductor manufacturing process is provided in the present invention, and comprises: a main body having a pipe including a through hole of which both ends are penetrated, and including an end in which a flange is formed; and a counter-flow preventing body which is coupled with the main body and has a passage through which a fluid flowing through the through hole may flow, wherein the passage has a funnel shape that is formed to gradually narrow in a direction in which the fluid flows, and is made of elastic material. The by-product counter-flow preventing device further comprises a fixing body which is in close contact with the flange of the main body to be coupled with the main body through screws and has a through hole formed therein, wherein the counter-flow preventing body passes through the through hole of the fixing body to be fixed. In an end of the counter-flowing preventing body to which the fixing body is coupled, a fixing piece extending outwards is formed. In the through hole of the fixing body, a receiving groove for receiving the fixing piece while being in close contact with the fixing piece is formed. The receiving groove has a depth corresponding to the thickness of the fixing piece such that an end surface of the fixing body corresponds to an end surface of the fixing piece when the counter-flow preventing body is coupled to the fixing body, thus preventing the fixing piece from protruding from the receiving groove. |
