| 摘要 |
The present invention relates to a gas sensor array capable of sensing various types of gases. The gas sensor array is able to perform a normal gas detecting operation by enabling power to normally be supplied to other heating electrode patterns even if a part of the heating electrode patterns formed on a membrane is damaged. A membrane layer is formed on an upper part of a silicone substrate wherein a part is etched. A plurality of heating electrode pads, the heating electrode patterns extended from each heating electrode pad, and a plurality of heating units heated by the power supplied by each heating electrode patterns are formed on the upper part of the membrane layer. A plurality of detection layers enclosing a detection electrode pattern and a part of the detection electrode pattern are formed on an upper part of an insulation layer enclosing the heating units and the heating electrode patterns. Each of the heating units is connected to the heating electrode patterns in a row in order for the power in a parallel method to be supplied to the heating units. |
