LARGE SCALE AND THICKNESS-MODULATED MoS2 NANOSHEETS

摘要

The invention is for fabricating large-area, thickness-modulated MoS2, varying from single to few layer MoS2 films on various substrates using a combination of magnetron sputtering followed by chemical vapor deposition. The thickness dependent energy bandgap engineering and surface induced polarity change is disclosed.

主权项

1. A method of making a thin layer MoS2 on a substrate comprising the steps of:
providing a substrate; providing a Molybdenum source; using a magnetron to induce a plasma to generate Molybdenum ions from the Molybdenum source; sputtering the Molybdenum ions on the substrate to form a thin layer of Molybdenum; placing the substrate in a CVD chamber; providing a sulphur source; forming a sulphur vapor from the sulphur source, wherein the sulphur vapor is in communication with the CVD chamber; and sulphurizing the thin layer of Molybdenum to form a thin layer of Molybdenum disulfide MoS2.