MICROFLUIDIC DEVICE WITH INTEGRATED STIRRING STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

A microfluidic device, comprising: a semiconductor body, having a first side and a second side, opposite to one another in a first direction; and at least one well, configured for containing a fluid, extending in the semiconductor body starting from the first side and being delimited at the bottom by a bottom surface. The microfluidic device further comprises a stirring structure integrated in the well at the bottom surface, the stirring structure including a first stirring portion coupled to the semiconductor body and provided with at least one first suspended beam configured for being moved in a second direction so as to generate, in use, agitation of the fluid present in said well.

主权项

1. A method, comprising:
forming a well in a semiconductor body, the well having a bottom surface, the well being configured to hold a fluid; forming a stirring structure integrated in the semiconductor body and located at least in part in the well, the forming of the stirring structure including:
forming a first stirring portion of the stirring structure, the first stirring portion being coupled to the bottom surface of the well; andforming a first suspended beam extending from the first stirring portion, the suspended beam being configured to move and generate agitation of the fluid in the well.