| 摘要 |
The present invention relates to a differential pressure sensor. The differential pressure sensor, according to the present invention, comprises: a housing comprising a body and a cover and having a first chamber, a second chamber and a third chamber separated from each other therein; a first pressure channel communicating with the first chamber, and a second pressure channel communicating with the second chamber and through which a gas having a higher pressure than a gas introduced through the first pressure channel is introduced; a substrate having a first surface facing the second and third chambers and a second surface parallel to the first surface and facing the first chamber, provided with electronic parts at a part of the first surface facing the third chamber, and having a terminal; a sensor element provided on the second surface of the substrate, arranged inside the first chamber and generating an electrical signal according to a pressure difference between the first chamber and the second chamber; a lead frame provided in the housing, of which one end extends to the inside of the third chamber, and configured to deliver the electrical signal of the sensor element to an external device; a lead wire for connecting the terminal of the substrate and the lead frame inside the third chamber so as to deliver the electrical signal of the sensor element to the lead frame; a first sealing part arranged in a region in which the body and the cover make contact and sealing the second and third chambers from the outside; a second sealing part arranged in a region in which the substrate and the body make contact and sealing the first chamber from the second chamber; and a third sealing part for sealing the third chamber from the second chamber. |
