发明名称 PURGING DEVICE AND PURGING METHOD
摘要 A container is purged with purge gas between an overhead traveling vehicle and a container delivery destination. A traveling rail for a local truck is provided below a traveling rail for the overhead traveling vehicle and above the container delivery destination to cause the local truck, provided with a hoist for raising and lowering the container, to travel thereon. A purge stand on which the container is mountable is provided below the traveling rail for the local truck and so as not to cover a portion immediately above the container delivery destination, and the purge gas is supplied to the container mounted on the purge stand by a purge gas supply device.
申请公布号 WO2016047260(A1) 申请公布日期 2016.03.31
申请号 WO2015JP71011 申请日期 2015.07.23
申请人 MURATA MACHINERY, LTD. 发明人 IWASAKI JUNJI
分类号 H01L21/677 主分类号 H01L21/677
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