发明名称 SUBSTRATE WARPAGE CONTROL USING TEMPER GLASS WITH UNI-DIRECTIONAL HEATING
摘要 A method including clamping an integrated circuit package substrate between first and second supporting substrates; exposing the clamped package substrate to a heat source from a single direction; and modifying a shape of the package substrate. An apparatus including a first and second supporting substrates, the first supporting substrate including a two-dimensional area that is 75 percent to 95 percent of the area of the first side of the package substrate and the second supporting substrate including a two-dimensional area that is at least equivalent to the area of a package substrate and each of the first supporting substrate and the second supporting substrate include a body having a cavity therein such that when assembled on opposite sides of a package substrate, each cavity has a volume dimension such that the body of the supporting substrate is not in contact with an area of a package substrate.
申请公布号 WO2016048383(A1) 申请公布日期 2016.03.31
申请号 WO2014US57921 申请日期 2014.09.27
申请人 INTEL CORPORATION 发明人 CHUNG, CHEE KEY;SHUTO, TAKASHI
分类号 H01L23/12;H01L23/48 主分类号 H01L23/12
代理机构 代理人
主权项
地址