发明名称 Semiconductor apparatus and method of manufacturing semiconductor apparatus
摘要 A semiconductor apparatus includes: an MOS type field effect transistor formed on a semiconductor substrate and having a first gate electrode set at a predetermined impurity concentration; and a charge modulation device formed on the semiconductor substrate and having a second gate electrode set at a predetermined impurity concentration lower than the impurity concentration of the first gate electrode.
申请公布号 US2016093660(A1) 申请公布日期 2016.03.31
申请号 US201514954988 申请日期 2015.11.30
申请人 c/o SONY CORPORATION 发明人 Anzai Kunio
分类号 H01L27/146;H01L29/423 主分类号 H01L27/146
代理机构 代理人
主权项 1. A semiconductor apparatus comprising: a first channel region of a semiconductor substrate between a source region of a first transistor and a drain region of the first transistor, said first channel region touching said source region of the first transistor and said drain region of the first transistor; a second channel region or a semiconductor substrate between a source region of a second transistor and a drain region of the second transistor, said second channel region touching said source region of the second transistor and said drain region of the second transistor; a first insulation film between a first gate electrode of a conductivity type and said first channel region, said first insulation film touching said first gate electrode and said first channel region, wherein the first gate electrode is made of a first transparent material; a second insulation film between a second gate electrode of a conductivity type and said second channel region, said second insulation film touching said second gate electrode and said second channel region, wherein the second gate electrode is made of a second transparent material different from the first transparent material, wherein a thickness of the first insulation film is less than a thickness of the second insulation film, an impurity concentration of the conductivity type in said second gate electrode being lower than an impurity concentration of the conductivity type in said first gate electrode.
地址 Tokyo JP