Plate, Transducer and Methods for Making and Operating a Transducer

摘要

A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.

主权项

1. A transducer comprising:
a movable electrode; and a fixed electrode spaced apart from the movable electrode, the fixed electrode comprising an opening, the opening comprising a convex portion, wherein the convex portion is curved towards the movable electrode.