METHOD AND APPARATUS FOR GENERATING PLASMA PULSES

摘要

A method and apparatus generates pulses that can be used for high-precision three-dimensional plasma treatment. At least two sources are furnished with at least one time function, wherein each of the at least two sources radiates an electromagnetic field generated by one of the time functions, and the at least one time function. In a method, the at least two sources cooperate in such a manner that at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points. An alternative method uses at least one source and at least one reflection element. An apparatus with at least two sources and at least one data processing device or at least one source, at least one reflection element and at least one data processing device is configured such that one of the methods can be executed.

主权项

1. A method for generating plasma pulses, wherein
at least two sources of which each is furnished with at least one corresponding time function, wherein each of the at least two sources radiates an electromagnetic field generated by the at least one corresponding time function, and the at least one corresponding time functions and the at least two sources cooperate in such a manner that a constructive temporal and spatial superposition of the radiated electromagnetic fields of at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points, wherein the at least two predetermined space-time points correspond to different locations in three dimensional space.